High precision part, with dimensions in the one millimeter range or significantly smaller, and micrometer tolerance schemes.

Micro-Electro-Mechanical System: The integration of mechanical structures (moving parts) with microelectronics.

Include microelectronics, photonics, optoelectronics, micromachining, microfluidics, embedded software and progressively nano-scale phenomena in small space. The system is characterized by a high degree of miniaturization.

Microsystems Technology: a collective term for technologies to built microsystems

Components and geometrical structures with dimensions in the micron range.

Rapid Prototyping, Rapid Manufacturing: Collective term for production methods, which are based on no tooling, additive/generative techniques for the fabrication of products.

Rapid Micro Product Development: A method for the fast development and series production of microparts, microstructured parts or Microsystems.

Computer Aided Design, the design of, e.g. microfluidic structures or Microsystems is done on a computer.

Electronic Design Automation, a subset of CAD

Chip Size Package: single-die, direct surface mountable package with an area of no more than 1.2 X the original die area (IPC/JEDEC J-STD-012)