Miniaturized mechanical and electro-mechanical elements, typically used for measurements, such as accelerometers and gyroscopes. Systems-on-a-chip (SoC) technology is used to embed mechanical devices such as fluid sensors, mirrors, actuators, pressure and temperature sensors, and vibration sensors on to semiconductor chips.

MEMs is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology.