Removing organic polymers by plasma etching. Plasma can decompose organic polymers to radicals which can react with active species of the plasma to short organic molecules which are gaseous in low pressure conditions. These molecules are removed by the vacuum pump. One major application is ashing of foto resist masks in microelectronic technology ( [..]

Formation of an activated sludge floc in a clarifier effluent that is well oxidized and floats on the water surface (has the appearance of gray ash).