An interaction between ions in the beam treating a substrate and the (inevitable) residual gases in the vacuum system. These interactions can produce charge state changes in beam ions. When this occurs, dose (and energy) errors can and do occur in the implantation process. Charge exchange reactions (e.g. neutralization) are the primary source of do [..]

Phenomenon in which an ion colliding with a molecule (or an atom) neutralizes itself by capturing an electron from the molecule/atom, and transforming the molecule/atom into a positive radical/ion.